All-sound-condition ultraviolet lasers have already been greatly used in the fields of mechanical flaw detection, lithography, micromachining and drugs for the benefits of small quantity, prolonged lifetime, higher efficiency, fantastic beam high quality, wide tuning and slim spectral line, and so on. Making use of substantial ability around-infrared coherent light supply as the elemental frequency source determined by nonlinear tuning technology, producing ultraviolet coherent radiation by multistage frequency conversion is thought to be a vital solution to establish the ultraviolet coherent light supply.
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As an example, The existing concave OC could get replaced by a airplane mirror which could mitigate the power density on the floor of M1 and the diamond. Moreover, utilizing high hurt threshold coatings for M1 and diamond would also improve the output electrical power without any damages. Then, the NIR laser in the 2nd Stokes wavelength may be higher sufficient, as well as its great beam excellent, to crank out the final DUV laser at 193 nm which has a significant common electrical power.
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LBO can also be a superb nonlinear crystal which is usually applied to the SHG from the NIR towards the green. The DUV laser is usually understood by two stages of SFG while in the LBO crystals because there is absolutely no stage-matching angle for LBO to convert the environmentally friendly laser at 515 nm or 532 nm on the DUV straight by SHG [sixteen]. Recently, the NSBBF crystal has also demonstrated its possible to get a superior conversion efficiency from 532 nm to 266 nm. The stroll-off angle and deff in the NSBBF are Just about similar to People of CLBO [seventeen].
On the opposite side, the facility scaling with the CLBO Crystal NIR laser is another factor to boost the typical ability in the 193-nm DUV laser. Due to lack of the significant-energy amplification Resolution of your NIR laser (for instance at 1553 nm), nonlinear frequency procedures like optical parameter oscillation (OPO) may very well be applied to develop a wavelength converter by shifting the wavelength from 1 μm to the desired wavelength together with obtaining relative greater electrical power [21]. Not too long ago, a diamond Raman laser confirmed its means in reaching a large energy along with a higher conversion efficiency for the 1st Stokes of your 1-μm laser [22,23], which means the likelihood to get applied within the 193-nm DUV laser generation due to its high Raman attain and huge frequency change.
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Additionally, combining the solid-condition laser with other nonlinear process for instance stimulated Raman scattering, NIR lasers could possibly be obtained at new wavelengths with large power and large beam high-quality, which was tested through the proof-of-basic principle experiment. This Raman laser plan gives a new route to the substantial-ability DUV laser, Particularly on the wavelength of 193 nm.
Tunable ultraviolet laser source determined by good-state dye laser technological innovation and CsLiB6O10 harmonic technology
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The event of your 193-nm laser was shown by phases of SFG. In an effort to scale the DUV laser electricity proficiently, a different strategy on the 193-nm DUV laser era is presented based on the diamond Raman laser.